Interesting review of previous work on Extreme Ultra-Violet (EUV) light sources. The options for 13nm are Tin, Lithium, and Xenon. ASML uses tin. Earlier work on tin had a roller rotating in a bath of molten tin, so that there was always tin on the roller for the LASER to vaporize. Hitting tin droplets in flight came later. There has been a little work on Xenon. Nobody tries Lithium.
Sector2 0 points 1 month ago
Sounds like further development after the Sulphur Bulb came out in the 90s.